Fabrication of sub-5 nm uniform zirconium oxide films on corrugated copper substrates by a scalable polymer brush assisted deposition method
نویسندگان
چکیده
We demonstrate a polymer brush assisted approach for the fabrication of continuous zirconium oxide (ZrO2) films over large areas with high uniformity (pin-hole free) on copper (Cu) substrates. This involves use thiol-terminated polymethyl methacrylate (PMMA-SH) as template layer selective infiltration oxynitrate (ZrN2O7). The preparation highly uniform covalently grafted monolayer Cu substrate is critical factor in fabricating metal film thickness across surface. Infiltration reliant chemical interactions between functional group and precursor. A following reductive H2 plasma treatment process results ZrO2 formation whilst surface Cu2O passive was reduced to Cu/Cu2O interface. Fundamental analysis resulting determined by XPS, GA-FTIR. Results derived from these techniques confirm inclusion ZrN2O7 into films. Cross-sectional transmission electron microscopy energy dispersive X-ray mapping corroborate at substrate. believe that this quick facile methodology prepare potentially scalable other high-κ dielectric materials interest microelectronic applications.
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ژورنال
عنوان ژورنال: Applied Surface Science
سال: 2023
ISSN: ['1873-5584', '0169-4332']
DOI: https://doi.org/10.1016/j.apsusc.2023.157329