Fabrication of sub-5 nm uniform zirconium oxide films on corrugated copper substrates by a scalable polymer brush assisted deposition method

نویسندگان

چکیده

We demonstrate a polymer brush assisted approach for the fabrication of continuous zirconium oxide (ZrO2) films over large areas with high uniformity (pin-hole free) on copper (Cu) substrates. This involves use thiol-terminated polymethyl methacrylate (PMMA-SH) as template layer selective infiltration oxynitrate (ZrN2O7). The preparation highly uniform covalently grafted monolayer Cu substrate is critical factor in fabricating metal film thickness across surface. Infiltration reliant chemical interactions between functional group and precursor. A following reductive H2 plasma treatment process results ZrO2 formation whilst surface Cu2O passive was reduced to Cu/Cu2O interface. Fundamental analysis resulting determined by XPS, GA-FTIR. Results derived from these techniques confirm inclusion ZrN2O7 into films. Cross-sectional transmission electron microscopy energy dispersive X-ray mapping corroborate at substrate. believe that this quick facile methodology prepare potentially scalable other high-κ dielectric materials interest microelectronic applications.

برای دانلود باید عضویت طلایی داشته باشید

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

منابع مشابه

Formation of Cupric Oxide Films on Quartz Substrates by Annealing the Copper Films

In the present work, cupric oxide (CuO) films were obtained through thermal annealing of the copper (Cu) films deposited on quartz substrates by DC magnetron sputtering method. The annealing was performed in air atmosphere for different times ranging from 60-240 min at temperature of 400 ºC. The influence of annealing times on structural and morphological properties of the films was investi...

متن کامل

Fabrication of sub-100 nm conducting polyaniline wire on a polymer substrate based on friction nanolithography.

Friction Nanolithography (FRNL) is used to fabricate polyaniline nano-wire on a flexible, insulating, and highly transparent substrate. FRNL uses SPM tip to scratch the substrate to form a trench with higher friction force. Polyaniline nano-wire is selectively deposited on the trench. Sub-100 nm polyaniline wire is fabricated based on FRNL.

متن کامل

Two-Stage Chemical Deposition of Oxide Films

Two-stage chemical deposition (TSCD) technique is used to produce ZnO, Mn2O3 and NiO films on soda-lime glass (SL-G) from an aqueous solution of zinc, manganese and nickel complex, respectively. The TSCD method enables the deposition of metal oxide thin films with a thickness which can be controlled during the preparation procedure. The ZnO, Mn2O3 and NiO thin films were polycrystalline films w...

متن کامل

ذخیره در منابع من


  با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید

ژورنال

عنوان ژورنال: Applied Surface Science

سال: 2023

ISSN: ['1873-5584', '0169-4332']

DOI: https://doi.org/10.1016/j.apsusc.2023.157329